Structure and method to reduce shorting and process degradation in stt-mram devices

ABSTRACT

A method of making a magnetic random access memory device includes forming a magnetic tunnel junction (MTJ) on an electrode, the MTJ including a reference layer, a tunnel barrier layer, and a free layer; disposing a hard mask on the MTJ; etching sidewalls of the hard mask and MTJ to form a stack with a first width and redeposit metal along the MTJ sidewall; depositing a sacrificial dielectric layer on the hard mask, surface of the electrode, exposed sidewall of the hard mask and the MTJ, and on redeposited metal along the sidewall of the MTJ; removing a portion of the sacrificial dielectric layer from sidewalls of the hard mask and MTJ and redeposited metal from the MTJ sidewalls; and removing a portion of a sidewall of the MTJ and hard mask to provide a second width to the stack; wherein the second width is less than the first width.

DOMESTIC PRIORITY

This application is a divisional of and claims priority from U.S. patentapplication Ser. No. 14/950,830, filed on Nov. 24, 2015, entitled“STRUCTURE AND METHOD TO REDUCE SHORTING AND PROCESS DEGRADATION INSTT-MRAM DEVICES,” the entire contents of which are incorporated hereinby reference.

BACKGROUND

The present invention relates to spin-transfer torque magnetoresistiverandom access memory (STT-MRAM devices), and more specifically, to stackstructures and etch processes in STT-MRAM devices.

STT-MRAM devices have some benefits over semiconductor-based memories,such as dynamic random-access memory (DRAM) and static random-accessmemory (SRAM). However, in order to compete with DRAM and SRAM, theSTT-MRAM devices are integrated into the wiring layers of standardsilicon logic and memory chips.

STT-MRAM device is a type of solid state, non-volatile memory that usestunneling magnetoresistance (TMR or MR) to store information. MRAMincludes an electrically connected array of magnetoresistive memoryelements, referred to as magnetic tunnel junctions (MTJs). Each MTJincludes a free layer and fixed/reference layer that each includes amagnetic material layer. A non-magnetic insulating tunnel barrierseparates the free and fixed/reference layers. The free layer and thereference layer are magnetically de-coupled by the tunnel barrier. Thefree layer has a variable magnetization direction, and the referencelayer has an invariable magnetization direction.

An MTJ stores information by switching the magnetization state of thefree layer. When magnetization direction of the free layer is parallelto the magnetization direction of the reference layer, the MTJ is in alow resistance state. Conversely, when the magnetization direction ofthe free layer is antiparallel to the magnetization direction of thereference layer, the MTJ is in a high resistance state. The differencein resistance of the MTJ may be used to indicate a logical ‘1’ or ‘0’,thereby storing a bit of information. The TMR of an MTJ determines thedifference in resistance between the high and low resistance states. Arelatively high difference between the high and low resistance statesfacilitates read operations in the MRAM.

SUMMARY

According to an embodiment, a method of making a magnetic random accessmemory (MRAM) device includes forming a magnetic tunnel junction (MTJ)on an electrode, the MTJ including a reference layer disposed in contactwith the electrode, a tunnel barrier layer disposed on the referencelayer, and a free layer disposed on the tunnel barrier layer; disposinga hard mask on the MTJ; etching sidewalls of the hard mask and the MTJto form a stack with a first width and redeposit a metal along asidewall of the MTJ; depositing a sacrificial dielectric layer on asurface of the hard mask, a surface of the electrode, an exposedsidewall of the hard mask and the MTJ, and on redeposited metalpositioned along the sidewall of the MTJ; removing a portion of thesacrificial dielectric layer from sidewalls of the hard mask and the MTJand the redeposited metal from sidewalls of the MTJ; and removing aportion of a sidewall of the MTJ and the hard mask to provide a secondwidth to the stack; wherein the second width is less than the firstwidth.

According to another embodiment, a method of making a magnetic randomaccess memory (MRAM) device forming a magnetic tunnel junction (MTJ) onan electrode, the MTJ including a reference layer disposed in contactwith the electrode, a tunnel barrier layer disposed on the referencelayer, and a free layer disposed on the tunnel barrier layer; disposinga hard mask on the MTJ; etching sidewalls of the hard mask and the MTJto form a stack with a first width and redeposit a metal along asidewall of the MTJ; depositing a sacrificial dielectric layer on asurface of the hard mask, a surface of the electrode, an exposedsidewall of the hard mask and MTJ, and on redeposited metal positionedalong the sidewall of the MTJ; performing a directional etch to remove aportion of the sacrificial dielectric layer from sidewalls of the hardmask and MTJ and the redeposited metal from sidewalls of the MTJ; anddepositing an encapsulating dielectric layer on the sacrificialdielectric layer.

Yet, according to another embodiment, a magnetic random access memory(MRAM) device includes a magnetic tunnel junction (MTJ) positioned on anelectrode, the MTJ including a reference layer positioned in contactwith the electrode, a tunnel barrier disposed on the reference layer,and a free layer disposed on the tunnel barrier layer; a hard maskdisposed on the free layer of the MTJ; and a sacrificial dielectricmaterial disposed on a surface of the hard mask, a surface of theelectrode, and a sidewall of a portion of the MTJ; wherein a portion ofa sidewall of the hard mask is substantially free of the sacrificialdielectric material.

BRIEF DESCRIPTION OF THE DRAWINGS

The subject matter which is regarded as the invention is particularlypointed out and distinctly claimed in the claims at the conclusion ofthe specification. The foregoing and other features, and advantages ofthe invention are apparent from the following detailed description takenin conjunction with the accompanying drawings in which:

FIGS. 1A-1C illustrate methods of making MRAM devices that result inmetal redeposition along sidewalls of the tunnel barrier; in which:

FIG. 1A is a cross-sectional side view of a patterned hard mask disposedon a MTJ stack;

FIG. 1B is a cross-sectional side view after etching the free layer andthe tunnel barrier layer of the MTJ stack; and

FIG. 1C is a cross-sectional side view after etching the reference layerof the MTJ stack;

FIGS. 2A-2C illustrate exemplary methods of making MRAM devices toremove metal redeposition according to various embodiments, in which:

FIG. 2A is a cross-sectional side view after patterning a hard mask andan MTJ stack on a contact electrode;

FIG. 2B is a cross-sectional side view after depositing a dielectricfilm on the patterned hard mask and MTJ stack; and

FIG. 2C is a cross-sectional side view using a directional etch toremove material from the device sidewalls; and

FIG. 2D is a cross-sectional side view after depositing an optionalencapsulating dielectric layer on the MRAM device.

DETAILED DESCRIPTION

One challenge of integrating STT-MRAM devices into wiring layers ofsilicon logic and memory chips is subtractive etching of the magneticstack from a blanket film. Specialized reactive ion etches (ME) andinert ion beam etches (IBE) may be used. However, ME processes foretching MRAM may cause device degradation. Although IBE processes maynot induce as much magnetic damage, they may cause metal redeposition(described in FIGS. 1A-1C below) that can induce electrical shortingacross the tunnel barrier layer. Shorting across the tunnel barrierlayer may reduce device yields. Metal redeposition can be removed byoxidizing the redeposited metal to make it insulating, but the oxidationprocess may also cause device degradation.

For example, FIGS. 1A-1C illustrate methods of making MRAM devices thatresult in metal redeposition along sidewalls of the tunnel barrier layer103. FIG. 1A is a cross-sectional side view of a patterned hard mask 110disposed on a MTJ stack 105. The MTJ stack 105 includes a referencelayer 102, a tunnel barrier layer 103, and a free layer 104. Thereference layer 102 and the free layer 104 include conductive, magneticmetals or metal alloys. The MTJ stack 105 is disposed on a contactelectrode 101 (bottom contact). A hard mask 110 is disposed on the MTJstack 105. The hard mask 110 is then patterned.

FIG. 1B is a cross-sectional side view after transferring the pattern ofthe hard mask 110 into the free layer 104 and the tunnel barrier layer103 of the MTJ stack 105. The free layer 104 and the tunnel barrierlayer 103 are etched, by, for example, a RIE or IBE process. During theetch process, the magnetic material of the free layer 104 is redepositedalong the sidewalls of the free layer 104, the tunnel barrier layer 103,and/or the hard mask 110.

FIG. 1C is a cross-sectional side view after etching the reference layer102 of the MTJ stack 105. Etching the reference layer 104 results ineven more magnetic material being deposited along the sidewalls of theMTJ stack 105, including along the reference layer 102 sidewalls. Theredeposited magnetic material may induce shorting along the tunnelbarrier 103.

Accordingly, various embodiments described herein, in contrast to FIGS.1A-1C, provide MRAM devices and methods that substantially reduce oreliminate electrical shorting caused by metal redeposition in an etchedMRAM device. The methods and devices also reduce process degradation. Insome embodiments, an IBE patterns the device to a larger size than thefinal desired size. A sacrificial insulator may be deposited using a lowpower, low temperature plasma enhanced chemical vapor deposition (PECVD)or physical vapor deposition (PVD) process to encapsulate the device.The insulator may be, but is not limited to, silicon nitride, silicondioxide, or aluminum oxide. A directional “clean-up” process etches thesidewalls of the device stack, substantially leaving the top surface ofthe stack intact. All of the processes may be performed in-situ in thethe same multi-chamber process tool. Accordingly, any redeposition fromthe substrate is a dielectric, which would not short the tunnel barrierlike a redeposited metal. Like reference numerals refer to like elementsacross different embodiments.

The following definitions and abbreviations are to be used for theinterpretation of the claims and the specification. As used herein, theterms “comprises,” “comprising,” “includes,” “including,” “has,”“having,” “contains” or “containing,” or any other variation thereof,are intended to cover a non-exclusive inclusion. For example, acomposition, a mixture, process, method, article, or apparatus thatcomprises a list of elements is not necessarily limited to only thoseelements but can include other elements not expressly listed or inherentto such composition, mixture, process, method, article, or apparatus.

As used herein, the articles “a” and “an” preceding an element orcomponent are intended to be nonrestrictive regarding the number ofinstances (i.e. occurrences) of the element or component. Therefore, “a”or “an” should be read to include one or at least one, and the singularword form of the element or component also includes the plural unlessthe number is obviously meant to be singular.

As used herein, the terms “invention” or “present invention” arenon-limiting terms and not intended to refer to any single aspect of theparticular invention but encompass all possible aspects as described inthe specification and the claims.

As used herein, the term “about” modifying the quantity of aningredient, component, or reactant of the invention employed refers tovariation in the numerical quantity that can occur, for example, throughtypical measuring and liquid handling procedures used for makingconcentrates or solutions. Furthermore, variation can occur frominadvertent error in measuring procedures, differences in themanufacture, source, or purity of the ingredients employed to make thecompositions or carry out the methods, and the like. In one aspect, theterm “about” means within 10% of the reported numerical value. Inanother aspect, the term “about” means within 5% of the reportednumerical value. Yet, in another aspect, the term “about” means within10, 9, 8, 7, 6, 5, 4, 3, 2, or 1% of the reported numerical value.

It will also be understood that when an element, such as a layer,region, or substrate is referred to as being “on” or “over” anotherelement, it can be directly on the other element or intervening elementsmay also be present. In contrast, when an element is referred to asbeing “directly on” or “directly over” another element, there are nointervening elements present, and the element is in contact with anotherelement.

Turning again to the Figures, FIGS. 2A-2C illustrate exemplary methodsof making MRAM devices according to various embodiments. FIG. 2A is across-sectional side view after patterning a hard mask 210 and an MTJstack 205 on a contact electrode 201.

The contact electrode 201 includes a conductive material(s) and formsthe bottom contact electrode of the MRAM device. Non-limiting examplesof conductive materials for the contact electrode include tantalum,tantalum nitride, titanium, or any combination thereof.

The contact electrode 201 may be formed by depositing a conductivematerial(s) onto a surface. The conductive material(s) may be depositedby, for example, physical vapor deposition (PVD), ion beam deposition(IBD), atomic layer deposition (ALD), or like processes.

To form the MTJ stack 205, the reference layer 202 is formed on thecontact electrode 201, the tunnel barrier layer 203 is formed on thereference layer 202, and the free layer 204 is formed on the tunnelbarrier layer 103. The reference layer 202 and the free layer 204include conductive, magnetic materials, for example, metals or metalalloys. The reference layer 202 and the free layer may be formed byemploying a deposition process, for example, PVD, IBD, ALD, or otherlike processes.

The reference layer 202 and the free layer 204 may include one layer ormultiple layers. The reference layer 202 and the free layer 204 mayinclude the same materials and/or layers or different materials and/orlayers. Non-limiting examples of materials for the reference layer 202and/or the free layer 203 include iron, cobalt, boron, aluminum, nickel,silicon, oxygen, carbon, zinc, beryllium, vanadium, boron, magnesium, orany combination thereof.

The reference layer 202 has a thickness that may generally vary and isnot intended to be limited. In some embodiments, the reference layer 202has a thickness in a range from about 5 to about 25 nm. In otherembodiments, the reference layer 202 has a thickness in a range fromabout 10 to about 15 nm.

The free layer 204 has a thickness that may generally vary and is notintended to be limited. In some embodiments, the free layer 204 has athickness in a range from about 5 to about 25 nm. In other embodiments,the free layer 204 has a thickness in a range from about 10 to about 15nm.

The tunnel barrier layer 203 includes a non-magnetic, insulatingmaterial. A non-limiting example of an insulating material for thetunnel barrier layer 203 includes magnesium oxide (MgO). The tunnelbarrier layer 203 may be formed on the reference layer 202 by, forexample, radiofrequency (RF) sputtering in some embodiments.Alternatively, the tunnel barrier layer 203 may be formed by oxidation(e.g., natural or radical oxidation) of a magnesium (Mg) layer depositedon the reference layer 202. After oxidation, the MgO layer may then becapped with a second layer of Mg.

A hard mask 210 material layer is disposed on the MTJ stack 205. Thehard mask 210 material layer may include one or more conductivematerials. The material forming the hard mask 210 may be deposited byemploying a deposition process, for example, PVD, IBD, or other likeprocesses. Non-limiting examples of conductive materials for the hardmask material layer include tantalum nitride, titanium, titaniumnitride, or any combination thereof.

The hard mask material layer is then patterned by etching to form apatterned hard mask 210. The hard mask 210 material layer may be etchedby, for example, employing a reactive ion etch (ME) process or ahalogen-based chemical etch process (e.g., including chlorine-containinggas and/or fluorine-containing gas chemistry). The hard mask 210 and thefree layer 204 are etched at different rates such that initially thehard mask 210 is etched and the free layer 204 remains un-etched.

After etching the hard mask 210, the MTJ stack 205 is etched. Thepattern from the hard mask 210 is transferred into the free layer 204,tunnel barrier layer 203, and reference layer 202. The free layer 204,tunnel barrier layer 203, and reference layer 202 are etched by, forexample, performing a MRAM stack etch process. The stack etch processmay be, for example, a RIE process or an IBE process. Etching the MTJstack 205 does not substantially degrade the hard mask 310.

Because the MTJ stack 205 includes magnetic materials (e.g., metal ormetal alloys), etching the MTJ stack 205 redeposits a portion of themagnetic material along a portion of the sidewall of the MTJ stack 205(redeposition 220). The redeposition 220 may be deposited along asidewall (or a portion of a sidewall) of the reference layer 202, tunnelbarrier layer 203, free layer 204, and/or the hard mask 210.

The initial size 250 of the device (first width) will be reduced insubsequent steps (see FIG. 2C) to a final desired size 230 (secondwidth). Thus the original width of the MTJ stack 205 and hard mask 210should be slightly larger than desired in the final device. The secondwidth of the final size 230 is less than the first width of the initialsize 250. In some embodiments, the first width (initial size 250) isabout 5 to about 40 nm larger than the second width (final desired size230).

FIG. 2B is a cross-sectional side view after depositing a sacrificialdielectric film 240 (sacrificial dielectric layer) on the patterned hardmask 210 and MTJ stack 205. The sacrificial dielectric film 240 coversthe contact electrode 201, MTJ stack 205, redeposition 220, and hardmask 210. The sacrificial dielectric film 240 is disposed on a surfaceof the hard mask 210 and directly in contact with exposed sidewalls ofthe hard mask 220 and MTJ 205.

Non-limiting examples of materials for the sacrificial dielectric film240 include dielectric oxides (e.g., silicon dioxide), dielectricnitrides (e.g., Si_(x)N_(y)), dielectric oxynitrides (e.g.,SiO_(x)N_(y)), aluminum oxides (e.g., Al_(x)O_(y)), or any combinationthereof.

For better process control, the sacrificial dielectric film 240 may bedeposited in situ (without breaking the chamber vacuum) after etchingthe MTJ stack 205, as shown in FIG. 2A. The sacrificial dielectric film240 is deposited using a low temperature and low power plasma enhancedchemical vapor deposition (PECVD) or physical vapor deposition (PVD).

The PVD method uses a physical process to deposit the material from atarget film. The PVD method may be, for example, electron beam PVD,pulsed laser deposition, sputter deposition, cathodic arc deposition, orother like processes.

The temperature used for the PVD is low. Using a low temperature isadvantageous because the magnetic properties of the MTJ begin to degradeat high process temperatures, for example, 300 to 400° C. In someembodiments, the PVD temperature is in a range from about 25 to about300° C. In other embodiments, the PVD temperature is in a range fromabout 25 to about 200° C.

The power used for PVD is also low. Using a low power is advantageousbecause radicals in the plasma too energetic and cause more damage tothe junctions when the power is too high. In some embodiments, the PVDpower is in a range from about 100 to about 1000 W. In otherembodiments, the PVD power is in a range from about 100 to about 300 W.

A PECVD method may also be used to deposit the sacrificial dielectricfilm 240. PECVD methods introduce reactant gases between a groundedelectrode and an RF-energized electrode. The capacitive coupling betweenthe electrodes excites reactant gases into a plasma that produces achemical reaction product that is deposited on a substrate. Thesubstrate is placed on the grounded electrode and heated to a lowtemperature. In some embodiments, the PECVD deposition temperature isless than 300° C. In other embodiments, the PECVD deposition temperatureis in a range from about 25 to about 400° C.

Various precursors for forming the sacrificial dielectric film 240 maybe used and depend on the type of material. In one non-limiting example,silane or dichlorosilane may be used as the silicon source gas. Thesilane may be combined with an oxygen source gas (e.g., molecular oxygenor nitrous oxide) to form silicon dioxide or a nitrogen gas source(e.g., ammonia or molecular nitrogen) to produce silicon nitride. Inanother non-limiting example, silicon dioxide may be deposited from atetraethoxysilane (TEOS) silicon precursor in an oxygen or oxygen-argonplasma.

The power used for PECVD is also low. In some embodiments, the PECVDpower is in a range from about 25 to about 1000 W. In other embodiments,the PECVD power is in a range from about 25 to about 500 W.

The thickness of the sacrificial dielectric film 240 may generally varyas it depends on the type of device and material. In some embodiments,the thickness of the sacrificial dielectric film 240 is in a range fromabout 5 to about 100 nm. In other embodiments, the thickness of thesacrificial dielectric film 240 is in a range from about 20 to about 40nm.

FIG. 2C is a cross-sectional side view using a directional etch toremove material from the device sidewalls. The direction etch removesthe sacrificial dielectric film 240 from the MTJ stack 205 and hard mask210 sidewalls. The directional etch removes the metal redeposition 220(shown in FIG. 2B). The metal redepostion 220 is replaced withredeposition from the sacrificial dielectric film 240. In oneembodiment, the sidewall of the MTJ stack 205 is substantially free ofmetal redeposition. In another embodiment, the sidewall of the tunnelbarrier layer 203 is substantially free of metal redeposition.

The directional etch also removes sidewall portions of the referencelayer 202, tunnel barrier layer 203, free layer 204, and hard mask 210.Removing sidewall portions of the MTJ stack 205 and hard mask 210, thusreduces the size of the device from the initial size 250 to the finaldesired size 230. Although the etch process is directional and themajority of the material is removed from the sidewalls, a portion of thesurface of the sacrificial dielectric film 240 may also be removed.

The directional etch process may be, for example, an IBE process. Thedirectional etch process replaces the metal redeposition 220 with aportion of the sacrificial dielectric film 240. The sacrificialdielectric film 240 is left deposited along sidewalls of the the MTJstack 205. The sacrificial dielectric film 240 may be deposited alongsidewalls of the reference layer 202, tunnel barrier layer 203, freelayer 204, and/or hard mask 210. Replacing the metal redeposition 220with the sacrificial dielectric film 240 substantially reduces and/orprevents electrical shorting that may result from metal being depositedon the tunnel barrier layer 203.

FIG. 2D is a cross-sectional side view after depositing an optionalencapsulating dielectric layer 260 on the MRAM device. The optionalencapsulating dielectric layer 260 protects the device from subsequentprocessing. The encapsulating dielectric layer 260 covers the surfaceand sidewalls of the sacrificial dielectric film 240. The encapsulatingdielectric layer 260 is disposed on sidewalls of the hard mask 210 andany sidewalls of the MTJ stack 205 that are not covered by thesacrificial dielectric film 240. The encapsulating dielectric layer 260may cover the redeposited portions of the sacrificial dielectric layer240. The encapsulating layer 260 is disposed directly on exposedsidewalls of the hard mask 210 and any exposed sidewalls of the MTJ 205.

The encapsulating dielectric layer 260 may be deposited using adeposition process, for example, chemical vapor deposition (CVD) orphysical vapor deposition (PVD). Non-limiting examples of materials forthe encapsulating dielectric layer 260 include dielectric oxides (e.g.,silicon dioxide), dielectric nitrides (e.g., Si_(x)N_(y)), dielectricoxynitrides (e.g., SiO_(x)N_(y)), or any combination thereof. Theencapsulating dielectric layer 260 may be the same or different than thesacrificial dielectric film 240.

The encapsulating dielectric layer 260 may have a thickness thatgenerally varies and depends on the type of material(s) and the type ofdevice. In some embodiments, the encapsulating dielectric layer 260 hasa thickness in a range from about 10 to about 100 nm. In otherembodiments, the encapsulating dielectric layer 260 has a thickness in arange from about 20 to about 40 nm.

The device stack may be further processed to form any final structure.For example, an interlayer dielectric (ILD) may be deposited on theencapsulating dielectric layer 260. The ILD may include a low-kdielectric oxide, including but not limited to, silicon dioxide,spin-on-glass, a flowable oxide, a high-density plasma oxide, or anycombination thereof. The ILD may be formed by performing depositionprocess, including, but not limited to CVD, PVD, plasma enhanced CVD,atomic layer deposition (ALD), evaporation, chemical solutiondeposition, or like processes.

To form a contact, a trench may be etched through the ILD and thenfilled with a metal(s). The ILD may be etched, for example, using a wetetch chemical process. A metallization process may be employed todeposit a metal into the trench and form a contact. The metal 340 may bedeposited by performing a deposition process, for example, CVD, PECVD,PVD, plating, thermal or e-beam evaporation, or sputtering. Non-limitingexamples of materials for the metal include copper, aluminum, or anycombination thereof.

As described above, various embodiments described herein, in contrast toFIGS. 1A-1C, provide MRAM devices and methods that substantially reduceor eliminate electrical shorting caused by metal redeposition in an ionbeam etched MRAM device. The methods and devices also reduce processdegradation. In some embodiments, an IBE patterns the device to a largersize than the final desired size. A sacrificial silicon nitridedielectric is deposited using a low power, low temperature plasmaenhanced chemical vapor deposition (PECVD) or physical vapor deposition(PVD) process to encapsulate the device. An IBE process “clean-up”process etches the sidewalls of the device stack, substantially leavingthe top surface of the stack intact. All of the processes may beperformed in-situ in the the same multi-chamber process tool.Accordingly, material redepositioned from the substrate is a dielectricmaterial, which would not short the tunnel barrier; as opposed to when ametal material is repositioned that may cause a short.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, element components,and/or groups thereof.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below are intended toinclude any structure, material, or act for performing the function incombination with other claimed elements as specifically claimed. Thedescription of the present invention has been presented for purposes ofillustration and description, but is not intended to be exhaustive orlimited to the invention in the form disclosed. Many modifications andvariations will be apparent to those of ordinary skill in the artwithout departing from the scope and spirit of the invention. Theembodiment was chosen and described in order to best explain theprinciples of the invention and the practical application, and to enableothers of ordinary skill in the art to understand the invention forvarious embodiments with various modifications as are suited to theparticular use contemplated.

The diagrams depicted herein are just one example. There may be manyvariations to this diagram or the steps (or operations) describedtherein without departing from the spirit of the invention. Forinstance, the steps may be performed in a differing order or steps maybe added, deleted or modified. All of these variations are considered apart of the claimed invention.

The descriptions of the various embodiments of the present inventionhave been presented for purposes of illustration, but are not intendedto be exhaustive or limited to the embodiments disclosed. Manymodifications and variations will be apparent to those of ordinary skillin the art without departing from the scope and spirit of the describedembodiments. The terminology used herein was chosen to best explain theprinciples of the embodiments, the practical application or technicalimprovement over technologies found in the marketplace, or to enableothers of ordinary skill in the art to understand the embodimentsdisclosed herein.

What is claimed is:
 1. A method of making a magnetic random accessmemory (MRAM) device, the method comprising: forming a magnetic tunneljunction (MTJ) on an electrode, the MTJ comprising a reference layerdisposed in contact with the electrode, a tunnel barrier layer disposedon the reference layer, and a free layer disposed on the tunnel barrierlayer; disposing a hard mask on the MTJ; etching sidewalls of the hardmask and the MTJ to form a stack with a first width and redeposit ametal along a sidewall of the MTJ; depositing a sacrificial dielectriclayer on a surface of the hard mask, a surface of the electrode, anexposed sidewall of the hard mask and MTJ, and on redeposited metalpositioned along the sidewall of the MTJ; performing a directional etchto remove a portion of the sacrificial dielectric layer from sidewallsof the hard mask and MTJ and the redeposited metal from sidewalls of theMTJ; and depositing an encapsulating dielectric layer on the sacrificialdielectric layer.
 2. The method of claim 1, wherein the encapsulatingdielectric layer is disposed on the sacrificial dielectric layer andexposed sidewalls of the hard mask and MTJ.
 3. The method of claim 1,wherein the sacrificial dielectric material is disposed directly incontact with a sidewall of the MTJ.
 4. The method of claim 3, whereinthe encapsulating dielectric layer is disposed on the sacrificialdielectric material.
 5. The method of claim 1, wherein the sidewall ofthe tunnel barrier layer is substantially free of the redeposited metal.6. The method of claim 1, wherein the directional etch comprises an ionbeam etch (IBE).
 7. The method of claim 1, wherein the sacrificialdielectric layer is silicon dioxide, silicon nitride, siliconoxynitride, aluminum oxide, or any combination thereof.
 8. The method ofclaim 1, wherein the tunnel barrier layer is magnesium oxide.
 9. Themethod of claim 1, wherein the hard mask is a conductive material. 10.The method of claim 1, wherein the sacrificial dielectric material isdeposited in-situ after etching sidewalls of the hard mask and the MTJ.11. A magnetic random access memory (MRAM) device, comprising: amagnetic tunnel junction (MTJ) positioned on an electrode, the MTJcomprising a reference layer positioned in contact with the electrode, atunnel barrier disposed on the reference layer, and a free layerdisposed on the tunnel barrier layer; a hard mask disposed on the freelayer of the MTJ; and a sacrificial dielectric material disposed on asurface of the hard mask, a surface of the electrode, and a sidewall ofa portion of the MTJ; wherein a portion of a sidewall of the hard maskis substantially free of the sacrificial dielectric material.
 12. TheMRAM of claim 1, further comprising an encapsulating dielectric layerdisposed on the sacrificial dielectric film and exposed sidewalls of thehard mask and MTJ.
 13. The MRAM of claim 11, wherein the sacrificialdielectric material is disposed directly in contact with a sidewall ofthe MTJ.
 14. The MRAM device of claim 13, wherein the encapsulatingdielectric layer is disposed on the sacrificial dielectric material. 15.The MRAM of claim 11, wherein the encapsulating layer is disposeddirectly on exposed sidewalls of the hard mask.
 16. The MRAM device ofclaim 15, wherein the encapsulating layer is disposed on the sacrificialdielectric material on the MTJ.
 17. The MRAM of claim 11, wherein asidewall of the MTJ is substantially free of redeposited metal.
 18. TheMRAM of claim 11, wherein the sacrificial dielectric film is silicondioxide, silicon nitride, silicon oxynitride, aluminum oxide, or anycombination thereof.
 19. The MRAM device of claim 11, wherein the tunnelbarrier layer is magnesium oxide.
 20. The MRAM device of claim 11,wherein the hard mask is a conductive material.